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<dc:title xml:lang="en"><![CDATA[Materiały Elektroniczne 1975 nr 3(11)]]></dc:title>
<dc:title xml:lang="en"><![CDATA[Oznaczanie zanieczyszczeń w mieszaninach azotu z silanem = Determination of impurities in nitrogen and silane mixtures]]></dc:title>
<dc:title xml:lang="pl"><![CDATA[Materiały Elektroniczne 1975 nr 3(11)]]></dc:title>
<dc:title xml:lang="pl"><![CDATA[Oznaczanie zanieczyszczeń w mieszaninach azotu z silanem]]></dc:title>
<dc:creator><![CDATA[Wolnik Irena]]></dc:creator>
<dc:subject xml:lang="en"><![CDATA[Electronic - journal - material]]></dc:subject>
<dc:subject xml:lang="en"><![CDATA[Electronic - materials]]></dc:subject>
<dc:subject xml:lang="en"><![CDATA[contamination]]></dc:subject>
<dc:subject xml:lang="en"><![CDATA[gas mixture]]></dc:subject>
<dc:subject xml:lang="en"><![CDATA[N2]]></dc:subject>
<dc:subject xml:lang="en"><![CDATA[SiH4]]></dc:subject>
<dc:subject xml:lang="pl"><![CDATA[Elektronika - czasopismo - materialy]]></dc:subject>
<dc:subject xml:lang="pl"><![CDATA[Materiały elektroniczne]]></dc:subject>
<dc:subject xml:lang="pl"><![CDATA[zanieczyszczenie]]></dc:subject>
<dc:subject xml:lang="pl"><![CDATA[mieszanina gazów]]></dc:subject>
<dc:subject xml:lang="pl"><![CDATA[N2]]></dc:subject>
<dc:description xml:lang="en"><![CDATA[s. 31-38 : il. ; 24 cm.]]></dc:description>
<dc:description xml:lang="en"><![CDATA[Bibliogr. s. 38]]></dc:description>
<dc:description xml:lang="pl"><![CDATA[s. 31-38 : il.]]></dc:description>
<dc:description xml:lang="pl"><![CDATA[Bibliogr. s. 38]]></dc:description>
<dc:publisher><![CDATA[Wydaw. Przemysłu Maszynowego "WEMA"]]></dc:publisher>
<dc:contributor><![CDATA[Chudy Marek]]></dc:contributor>
<dc:contributor><![CDATA[Wiśniewski Romuald]]></dc:contributor>
<dc:date><![CDATA[1975]]></dc:date>
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<dc:type xml:lang="pl"><![CDATA[Tekst]]></dc:type>
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<dc:format xml:lang="pl"><![CDATA[24 cm.]]></dc:format>
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<dc:identifier><![CDATA[https://rcin.org.pl/dlibra/publication/10772/edition/19872/content]]></dc:identifier>
<dc:identifier><![CDATA[oai:rcin.org.pl:19872]]></dc:identifier>
<dc:source xml:lang="en"><![CDATA[ITME, sygn. dostępny]]></dc:source>
<dc:source xml:lang="en"><![CDATA[http://katalog.pan.pl/webpac-bin/218bitmeEN/wgbroker.exe?new+-access+top+search+open+NR+kv_5446]]></dc:source>
<dc:source xml:lang="pl"><![CDATA[ITME, sygn. dostępny]]></dc:source>
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<dc:language><![CDATA[pol]]></dc:language>
<dc:relation><![CDATA[Electronic Materials]]></dc:relation>
<dc:relation><![CDATA[oai:rcin.org.pl:publication:10772]]></dc:relation>
<dc:relation><![CDATA[Materiały Elektroniczne]]></dc:relation>
<dc:rights xml:lang="en"><![CDATA[Rights Reserved - Free Access]]></dc:rights>
<dc:rights xml:lang="pl"><![CDATA[Prawa zastrzeżone - dostęp nieograniczony]]></dc:rights>
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