@misc{Gawlik_Grzegorz_Badania_1987,
 author={Gawlik Grzegorz},
 volume={58},
 number={2},
 copyright={Rights Reserved - Free Access},
 address={Warszawa},
 journal={Electronic Materials},
 howpublished={online},
 year={1987},
 publisher={Wydaw. Przemysłu Maszynowego "WEMA"},
 language={pol},
 type={Text},
 title={Badania elipsometryczne krzemu implantowanego fosforem = Ellipsometric studies of P+ implanted silicon},
 URL={http://www.rcin.org.pl/Content/9631/PDF/WA901_12513_M1_r1987-z2-58_Mater-Elektroniczne_Gawlik_i.pdf},
 keywords={Electronic - journal - material, Electronic materials, ellipsometric studies, implanted silicon},
}