@misc{Sarnecki_Jerzy_Metoda_2014, author={Sarnecki Jerzy}, editor={Brzozowski Andrzej}, editor={LipiƄski Dariusz}, copyright={Rights Reserved - Free Access}, address={Warszawa}, howpublished={online}, year={2014}, language={pol}, abstract={24}, title={Metoda otrzymywania monokrystalicznych folii krzemowych z wykorzystaniem krzemu porowatego = A method of obtaining monocrystalline silicon foils using porous silicon}, type={Text}, URL={http://www.rcin.org.pl/Content/49011/PDF/WA901_Mater-Elektron_r2014_t42_z1_sarnecki_i.pdf}, volume={42}, number={1}, journal={Electronic Materials}, publisher={ITME}, keywords={epitaxial layer, porous silicon, CVD, silicon foil}, }