@misc{Kurth_Steffen_Mirror_1998, author={Kurth Steffen}, number={1}, copyright={Rights Reserved - Free Access}, address={Warszawa}, journal={NEXUS Research News}, howpublished={online}, year={1998}, publisher={Institute of Electronic Materials Technology}, language={eng}, type={Text}, title={Mirror arrays for laser beam deflection}, URL={http://www.rcin.org.pl/Content/39043/PDF/WA901_55966_r1998-z1_NEXUS-Kurth-mirror_i.pdf}, keywords={deflection of the laser beam, laser, the matrix of mirrors, micromechanical}, }