@misc{Dobrzański_Lech_Mask_1997, author={Dobrzański Lech}, number={3}, editor={Kowalik Andrzej}, copyright={Rights Reserved - Free Access}, address={Warszawa}, journal={MST News Poland}, howpublished={online}, year={1997}, publisher={Institute of Electronic Materials Technology}, language={eng}, type={Text}, title={Mask shop at the Institute of Electronic Materials Technology}, URL={http://www.rcin.org.pl/Content/39006/PDF/WA901_55857_r1997-z3_MST-Dobrzanski-mask_i.pdf}, keywords={submicron lithography, mask}, }