@misc{Nossarzewska-Orłowska_Elżbieta_Krzemowe_1976, author={Nossarzewska-Orłowska Elżbieta}, volume={16}, number={4}, editor={Lachowski Andrzej}, copyright={Rights Reserved - Free Access}, address={Warszawa}, journal={Electronic Materials}, howpublished={online}, year={1976}, publisher={Wydaw. Przemysłu Maszynowego "WEMA"}, language={pol}, title={Krzemowe warstwy epitaksjalne o grubości powyżej 20 um = Silicon epitaxial layers of thickness above 20 um}, type={Text}, URL={http://www.rcin.org.pl/Content/27264/PDF/WA901_45234_M1_r1976-z4-16_Mater-Elektron-Nos_i.pdf}, keywords={Electronic - journal - material, Electronic - materials, silicon epitaxial layer, layer thickness, Si}, }