@misc{Pawłowska_Marta_Wpływ_1995, author={Pawłowska Marta}, volume={23}, number={1}, copyright={Rights Reserved - Free Access}, address={Warszawa}, journal={Electronic Materials}, howpublished={online}, year={1995}, publisher={ITME}, language={pol}, type={Text}, title={Wpływ zanieczyszczeń metalicznych na profil sygnału EBIC w krzemowych strukturach epitaksjalnych = Influence of metalic contaminations on EBIC signal profiles in silicon epilayers}, URL={http://www.rcin.org.pl/Content/14749/PDF/WA901_14642_M1_r1995-t23-z1_Mater-Elektroniczne_Pawlowska_i.pdf}, keywords={Electronic - materials, Electronic - journal - materials, metallic contamination, EBIC, silicon epitaxial layer}, }